5 Simple Statements About CLBO Crystal Explained
5 Simple Statements About CLBO Crystal Explained
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All-reliable-state ultraviolet lasers are widely Employed in the fields of mechanical flaw detection, lithography, micromachining and medicine for the benefits of small volume, extensive daily life, large performance, good beam good quality, huge tuning and slim spectral line, etcetera. Making use of superior power near-infrared coherent light resource as the basic frequency resource according to nonlinear tuning technologies, producing ultraviolet coherent radiation by multistage frequency conversion is considered a crucial technique to establish the ultraviolet coherent light-weight supply.
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We summarized the current enhancement standing of the significant-electrical power DUV laser both equally with the wavelength of FHG from the one-μm laser and at 193 nm. The recent progress from the stable-state/fiber laser, plus the nonlinear optical crystals, prompts not only the normal power but also the beam good quality (coherence) of your DUV lasers to an unprecedented level.
As an example, The existing concave OC could be replaced by a aircraft mirror which could mitigate the facility density within the area of M1 as well as the diamond. Furthermore, applying higher damage threshold coatings for M1 and diamond would also improve the output electricity with none damages. Then, the NIR laser at the 2nd Stokes wavelength could possibly be substantial more than enough, as well as its great beam excellent, to deliver the ultimate DUV laser at 193 nm with a substantial normal electric power.
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Due to thermal lens outcome during the sound-point out lasers, If your heating management is insufficient, It is far from simple to get the good-state laser that has a high electrical power and also a superior beam high quality concurrently. Just lately, with the event of the thin disk laser and solitary-crystal fiber (SCF) laser, a large-electricity laser at the basic wavelength (1 μm) had been realized with a great beam top quality Despite a TEM00 manner beam [four,24], which might be excellent candidates for the fundamental from the DUV laser technology. A different applicant for the fundamental is definitely the significant-energy fiber laser which could be obtained by coherent beam mixture with M2 value less than 1.
On another aspect, the power scaling of your NIR laser is an additional facet to boost the click here average ability on the 193-nm DUV laser. As a result of not enough the significant-electrical power amplification Remedy of the NIR laser (by way of example at 1553 nm), nonlinear frequency processes for example optical parameter oscillation (OPO) could be applied to produce a wavelength converter by shifting the wavelength from 1 μm to the desired wavelength and also getting relative greater electricity [21]. Just lately, a diamond Raman laser confirmed its ability in obtaining a superior power as well as a substantial conversion effectiveness for the 1st Stokes with the one-μm laser [22,23], which suggests the likelihood to get utilized while in the 193-nm DUV laser era thanks to its substantial Raman get and huge frequency shift.
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The pulse duration of the next Stokes light was shortened to 5 ns as demonstrated in Determine 7a, only one-shot image with the oscilloscope, that is a typical phenomenon in Raman laser [forty four] while the heartbeat length of your pump laser was 10 ns.
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The conversion performance from basic NIR to DUV is from five% to 36% according to the described results in Desk one. Raising the conversion efficiency will lessen the burden on the design and set up of the elemental laser amplifier plus the electric powered electricity use. A great beam good quality of the elemental laser may also contribute on the expanding of the conversion efficiency in addition to the suitable electricity depth with the NIR and environmentally friendly laser during the SHG and FHG process, respectively. The highest conversion efficiencies from NIR to green and environmentally friendly to DUV laser by use of CLBO crystal are 70% and close to 50%, respectively [twelve], which corresponds into the conversion performance of 35% from elementary to DUV.
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